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期刊名称：MICROLITHOGRAPHY WORLD ISSN： 1074-407X 出版频率： Quarterly 出版社： PENNWELL PUBL CO, 98 SPIT BROOK RD, NASHUA, USA, NH, 03062-2801 期刊网址： http://sst.pennnet.com/articles/print_toc.cfm?p=28 影响因子： 0.25(2008) 主题范畴： ENGINEERING, ELECTRICAL & ELECTRONIC;    OPTICS 期刊简介(About the journal)    编辑部信息(Editorial Board)    About the journal Microlithography World, published quarterly, is the only publication exclusively devoted to the highly specialized microlithography industry, and reaches those responsible for purchasing advanced lithography equipment and supplies. Editorial Board M. David Levenson Editor in Chief If you have comments on this editorial - or anything else - do not hesitate to e-mail me at marcl@pennwell.com or to write me at 201 San Antonio Circle, Suite 205, Mountain View, CA 94040. Microlithography World November, 2005 Author(s) :   M David Levenson